VET-001 integrates a two-stage architecture of Roots pump + rotary vane vacuum pump, achieving an efficient pumping speed of 30L/S and an ultimate vacuum of 1×10⁻²Pa. It is equipped with an Omron/Weinon touch screen + PLC numerical control system, supports automatic fault diagnosis, adaptive startup and remote control, and is suitable for industrial vacuum scenarios such as electronics, semiconductors, and laboratories.
VEAT-001 high vacuum pumping station is a fully automatic vacuum processing equipment designed for semiconductor manufacturing, aerospace component packaging, optoelectronic material processing and other fields. It supports 6-20 stations of synchronous vacuuming, and the ultimate vacuum degree reaches 6.7×10⁻⁴Pa. It adopts an oil-free molecular pump + mechanical pump three-stage system, which complies with IEC 60255 and ISO 9001 standards.
