VEAT-001 high vacuum pumping station is a fully automatic vacuum processing equipment designed for semiconductor manufacturing, aerospace component packaging, optoelectronic material processing and other fields. It supports 6-20 stations of synchronous vacuuming, and the ultimate vacuum degree reaches 6.7×10⁻⁴Pa. It adopts an oil-free molecular pump + mechanical pump three-stage system, which complies with IEC 60255 and ISO 9001 standards.
